| Series Editors' Foreword | 7 |
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| Preface | 9 |
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| Contents | 13 |
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| Abbreviations | 19 |
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| 1 Introduction | 21 |
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| 1.1 Micro-/Nano-positioning Technique | 21 |
| 1.2 Actuators and Sensors | 22 |
| 1.3 Piezoelectric Nonlinearity | 24 |
| 1.4 Feedforward Control Based on Hysteresis Models | 25 |
| 1.4.1 Conventional Hysteresis Model | 26 |
| 1.4.2 Intelligent Hysteresis Model | 28 |
| 1.4.3 Feedforward Plus Feedback Control | 28 |
| 1.5 Robust Feedback Control | 29 |
| 1.5.1 Sliding-Mode Control | 30 |
| 1.5.2 Model Predictive Control | 31 |
| 1.5.3 Model-Reference Adaptive Control | 32 |
| 1.5.4 Other Control Strategies | 33 |
| 1.6 Position/Force Control in Micromanipulation | 33 |
| 1.6.1 Hybrid Control | 34 |
| 1.6.2 Impedance Control | 34 |
| 1.6.3 Switching Control | 35 |
| 1.7 Book Summary | 36 |
| References | 36 |
| Part I Hysteresis-Model-Based FeedforwardControl | 41 |
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| 2 Feedforward Control Based on Inverse Hysteresis Models | 42 |
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| 2.1 Introduction | 42 |
| 2.2 System Description and Hysteresis Characterization | 43 |
| 2.2.1 Experimental Setup | 43 |
| 2.2.2 Hysteresis Characterization | 44 |
| 2.3 Hysteresis Modeling | 47 |
| 2.3.1 Hysteresis Modeling with the Bouc--Wen Model | 47 |
| 2.3.2 Hysteresis Modeling with the MPI Model | 48 |
| 2.3.3 Hysteresis Modeling with the LSSVM | 51 |
| 2.4 Experimental Studies | 55 |
| 2.4.1 Bouc--Wen Model Results | 55 |
| 2.4.2 MPI Model Results | 56 |
| 2.4.3 LSSVM Model Results | 59 |
| 2.4.4 Model Capability Comparison | 61 |
| 2.4.5 Generalization Study | 63 |
| 2.5 Controller Design and Verification | 66 |
| 2.5.1 Feedforward Controller Design | 66 |
| 2.5.2 Feedforward Plus Feedback Controller Design | 68 |
| 2.5.3 Controller Verification | 68 |
| 2.6 Chapter Summary | 73 |
| References | 73 |
| 3 Feedforward Control Without Modeling Inverse Hysteresis | 75 |
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| 3.1 Introduction | 75 |
| 3.2 Dynamics Modeling of Hysteretic System | 76 |
| 3.2.1 Dynamics Modeling with Bouc--Wen Hysteresis | 76 |
| 3.2.2 Dynamics Modeling with Intelligent Hysteresis Model | 77 |
| 3.3 Hysteresis Modeling Using LSSVM | 78 |
| 3.3.1 Regression Model Establishment | 78 |
| 3.3.2 LSSVM Modeling | 78 |
| 3.4 Experimental Studies on Hysteresis Identification | 80 |
| 3.4.1 Experimental Setup | 80 |
| 3.4.2 Dynamics Model Identification | 81 |
| 3.4.3 Bouc--Wen Model Results | 82 |
| 3.4.4 LSSVM Model Results | 85 |
| 3.5 Experimental Studies on Hysteresis Compensation | 89 |
| 3.5.1 Feedforward Compensation | 89 |
| 3.5.2 Feedforward Plus Feedback Control | 91 |
| 3.6 Chapter Summary | 92 |
| References | 93 |
| Part II Hysteresis-Model-Free,State-Obser ver-Based Feedback Control | 94 |
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| 4 Model Predictive Discrete-Time Sliding-Mode Control | 95 |
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| 4.1 Introduction | 95 |
| 4.2 Problem Formulation | 97 |
| 4.2.1 Dynamics Modeling of a Nanopositioning System | 97 |
| 4.2.2 Sliding-Mode Controller Design | 99 |
| 4.2.3 Control Gain Design | 101 |
| 4.3 DTSMC Design | 102 |
| 4.3.1 Controller Design and Analysis | 102 |
| 4.3.2 Tracking Error Bound Analysis | 104 |
| 4.4 MPDTSMC Design | 105 |
| 4.4.1 MPDTSMC Controller Design | 105 |
| 4.4.2 Stability Analysis | 107 |
| 4.4.3 State Observer Design | 108 |
| 4.4.4 Tracking and Estimation Error Bound Analysis | 109 |
| 4.5 Experimental Investigation | 110 |
| 4.5.1 Experimental Setup | 110 |
| 4.5.2 Hysteresis Characterization | 110 |
| 4.5.3 Plant Model Identification | 111 |
| 4.5.4 Controller Parameter Design | 112 |
| 4.5.5 Simulation Studies | 113 |
| 4.5.6 Experimental Testing Results | 115 |
| 4.5.7 Discussion on System Performance | 118 |
| 4.6 Chapter Summary | 119 |
| References | 119 |
| 5 Model Predictive Output Integral Discrete-Time Sliding-Mode Control | 121 |
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| 5.1 Introduction | 121 |
| 5.2 Problem Formulation | 122 |
| 5.3 MPOIDSMC Design | 123 |
| 5.3.1 OIDSMC Controller Design | 123 |
| 5.3.2 MPOIDSMC Controller Design | 125 |
| 5.4 Experimental Investigations | 130 |
| 5.4.1 Experimental Setup | 130 |
| 5.4.2 Plant Model Identification | 131 |
| 5.4.3 Controller Parameter Design | 132 |
| 5.4.4 Experimental Studies | 134 |
| 5.4.5 Discussion on Controller Performance | 137 |
| 5.5 Chapter Summary | 138 |
| References | 138 |
| Part III Hysteresis-Model-Free,State-Observer-Free Feedback Control | 140 |
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| 6 Digital Sliding-Mode Control of Second-Order Systems | 141 |
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| 6.1 Introduction | 141 |
| 6.2 Dynamics Model and Problem Formulation | 142 |
| 6.3 DSMC Design | 144 |
| 6.4 Experimental Studies | 147 |
| 6.4.1 Experimental Setup | 147 |
| 6.4.2 Plant Model Identification | 148 |
| 6.4.3 Experimental Results | 149 |
| 6.4.4 Discussion | 159 |
| 6.5 Chapter Summary | 159 |
| References | 160 |
| 7 Digital Sliding-Mode Control of High-Order Systems | 161 |
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| 7.1 Introduction | 161 |
| 7.2 Problem Formulation | 162 |
| 7.2.1 System Modeling | 162 |
| 7.2.2 Dis
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