: Albert G. Baca, Carroll I. H. Ashby
: Fabrication of GaAs Devices
: The Institution of Engineering and Technology
: 9781849190688
: 1
: CHF 155.00
:
: Naturwissenschaft
: English
This book provides fundamental and practical information on all aspects of GaAs processing. The book also gives pragmatic advice on cleaning and passivation, wet and dry etching and photolithography, and dry etching.