: Jürg Schwizer, Michael Mayer, Oliver Brand
: Force Sensors for Microelectronic Packaging Applications
: Springer-Verlag
: 9783540269458
: 1
: CHF 85.30
:
: Sonstiges
: English
: 178
: Wasserzeichen/DRM
: PC/MAC/eReader/Tablet
: PDF

Intended for wire-bonding and flip-chip packaging professionals and for scientists and engineers working in the field of mechanical microsensors, this practical monograph introduces novel measurement technologies that allow for in situ and real-time examination of physical processes during the packaging process or during subsequent reliability tests. The measurement system presented here makes possible measurements at formerly inaccessible packaging interconnects. For the first time it becomes possible to describe the wire-bonding process window in terms of the physical forces at the contact zone instead of the applied machine settings. This is significant for a deeper understanding and future development of these packaging processes. Applications of the sensor in the field of wire bonding and flip-chip characterization are also illustrated. The reader will gain much insight into the important field of interconnection technology in semiconductor packaging.

Preface6
Contents8
1 Introduction10
1.1 Electrical Interconnection Methods10
1.2 The Wire Bonding Process12
1.3 Measurement Approaches for Bonding Process Investigation19
2 Sensor Design21
2.1 Design Concept21
2.2 Ball Bond Sensor44
2.3 Wedge Bond Sensor54
3 Measurement System57
3.1 Test Chip57
3.2 Wire Bonding Signals and Measurement System61
4 Characterization75
4.1 General Data76
4.2 Sensor Calibration76
4.3 Linearity87
4.4 Placement Sensitivity88
4.5 Offset90
4.6 Summary of Technical Data of the Test Chip100
5 Applications101
5.1 Wire Bonder Development102
5.2 Ball Bond Process Knowledge123
5.3 Wedge Bonding Process Knowledge147
5.4 Flip-Chip Application162
6 Conclusions and Outlook166
Conclusions166
Outlook167
Abbreviations, Symbols, and Definitions168
Abbreviations168
Symbols169
Definitions170
References171
Subject Index181