| Preface | 6 |
|---|
| Contents | 8 |
|---|
| 1 Introduction | 10 |
|---|
| 1.1 Electrical Interconnection Methods | 10 |
| 1.2 The Wire Bonding Process | 12 |
| 1.3 Measurement Approaches for Bonding Process Investigation | 19 |
| 2 Sensor Design | 21 |
|---|
| 2.1 Design Concept | 21 |
| 2.2 Ball Bond Sensor | 44 |
| 2.3 Wedge Bond Sensor | 54 |
| 3 Measurement System | 57 |
|---|
| 3.1 Test Chip | 57 |
| 3.2 Wire Bonding Signals and Measurement System | 61 |
| 4 Characterization | 75 |
|---|
| 4.1 General Data | 76 |
| 4.2 Sensor Calibration | 76 |
| 4.3 Linearity | 87 |
| 4.4 Placement Sensitivity | 88 |
| 4.5 Offset | 90 |
| 4.6 Summary of Technical Data of the Test Chip | 100 |
| 5 Applications | 101 |
|---|
| 5.1 Wire Bonder Development | 102 |
| 5.2 Ball Bond Process Knowledge | 123 |
| 5.3 Wedge Bonding Process Knowledge | 147 |
| 5.4 Flip-Chip Application | 162 |
| 6 Conclusions and Outlook | 166 |
|---|
| Conclusions | 166 |
| Outlook | 167 |
| Abbreviations, Symbols, and Definitions | 168 |
|---|
| Abbreviations | 168 |
| Symbols | 169 |
| Definitions | 170 |
| References | 171 |
|---|
| Subject Index | 181 |